Bonding in Microsystem Technology
| Autor: | Jan A. Dziuban |
|---|---|
| EAN: | 9781402045899 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 30.01.2007 |
| Kategorie: | |
| Schlagworte: | Natur bonding/anodic bonding deep micromachining design development electronics glass machining microelectromechanical system (MEMS) microengineering microsystems silicon technology |
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This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
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