Evolution of Thin Film Morphology
Autor: | Matthew Pelliccione, Toh-Ming Lu |
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EAN: | 9780387751092 |
eBook Format: | |
Sprache: | Englisch |
Produktart: | eBook |
Veröffentlichungsdatum: | 29.01.2008 |
Untertitel: | Modeling and Simulations |
Kategorie: | |
Schlagworte: | Helium-Atom-Streuung REM aggregation models coating continuum equations modeling morphology plasma etching programming surfaces thin film tribology |
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The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. It will benefit those working in any discipline that requires an understanding of thin film growth processes.