Fundamental Principles of Engineering Nanometrology
Autor: | Richard Leach |
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EAN: | 9781437778328 |
eBook Format: | ePUB/PDF |
Sprache: | Englisch |
Produktart: | eBook |
Veröffentlichungsdatum: | 03.09.2009 |
Kategorie: | |
Schlagworte: | Micro/Nanotechnology William Andrew |
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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati
- Provides a basic introduction to measurement and instruments
- Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
- Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
- Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
- Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati