Laser Annealing Processes in Semiconductor Technology
Autor: | Fuccio Cristiano, Antonino La Magna |
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EAN: | 9780128202562 |
eBook Format: | ePUB |
Sprache: | Englisch |
Produktart: | eBook |
Veröffentlichungsdatum: | 21.04.2021 |
Untertitel: | Theory, Modeling and Applications in Nanoelectronics |
Kategorie: | |
Schlagworte: | Ab initio Atomistic simulation CO2 laser Carbon Conduction band Defects Density matrix theory Design of experiments Diamond-like carbon Diffusion kinetics Germanium annealing Kinetic Monte Carlo Laser Laser annealing Melting Molecular |
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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. - Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena - Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations - Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors