MEMS: A Practical Guide of Design, Analysis, and Applications
| Autor: | Jan Korvink, Oliver Paul |
|---|---|
| EAN: | 9783540336556 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 28.05.2010 |
| Untertitel: | A Practical Guide of Design, Analysis, and Applications |
| Kategorie: | |
| Schlagworte: | Microelectromechanical Systems Micromachining Microtechnology Reference Sensor Standard microelectromechanical system (MEMS) microsystems optics production simulation |
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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
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