Mems/Nems
| Autor: | Cornelius T. Leondes |
|---|---|
| EAN: | 9780387257860 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 08.10.2007 |
| Untertitel: | (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS |
| Kategorie: | |
| Schlagworte: | Finite-Elemente-Methode Rotor Sensor communication design design methods development finite element method integrated circuit laser microelectromechanical system (MEMS) modeling production simulation vibration |
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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
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