Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Nominated as an Excellent Doctoral Dissertation by Peking University Presents a mass-production technology to realize micro/nano hierarchical structures on various substrates Broadens readers' understanding on the new micro/nano integrated fabrication technology by experimental tests and theoretical simulations Introduces the technology in microenergy field and realizes several novel high-performance nanogenerators Includes supplementary material: sn.pub/extras

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