Microsystems Mechanical Design
| Autor: | Francesco De Bona, Eniko T. Enikov |
|---|---|
| EAN: | 9783211485491 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 23.03.2007 |
| Kategorie: | |
| Schlagworte: | Nanotechnologie behavior design dynamics engineering mechanics fluidics mechanics mechanism mechanisms microelectromechanical system (MEMS) microfluidics microstructure microsystems modeling nano-scale |
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This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.
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