Multi-Wafer Rotating MEMS Machines
| Autor: | Jeffrey H. Lang |
|---|---|
| EAN: | 9780387777474 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 18.09.2009 |
| Untertitel: | Turbines, Generators, and Engines |
| Kategorie: | |
| Schlagworte: | Generator MIT gas turbine engine Motor Sensor Wafer combustion electrical engineering gas turbine material materials selection microelectromechanical system (MEMS) microsystems power MEMS device sensors turbomachinery |
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The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
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