Nanofabrication
| Autor: | Maria Stepanova, Steven Dew |
|---|---|
| EAN: | 9783709104248 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 08.11.2011 |
| Untertitel: | Techniques and Principles |
| Kategorie: | |
| Schlagworte: | nanofabrication technologies nanolithography nanoscale patterns nanoscale structures nanotechnology |
149,79 €*
Versandkostenfrei
Die Verfügbarkeit wird nach ihrer Bestellung bei uns geprüft.
Bücher sind in der Regel innerhalb von 1-2 Werktagen abholbereit.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Verwandte Artikel