Scanning Electron Microscopy and X-Ray Microanalysis

This text provides students as well as practitioners (engineers, technicians, physical and biological scientists, clinicians, and technical managers) with a comprehensive introduction to the field of scanning electron microscopy (SEM) and X-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers, the characteristics of electron beam - specimen interactions, image formation and interpretation, the use of x-rays for qualitative and quantitative analysis and the methodology for structural analysis using electron back-scatter diffraction. SEM sample preparation methods for hard materials, polymers, and biological specimens are covered in separate chapters. In addition techniques for the elimination of charging in non-conducting specimens are detailed. A data base of useful parameters for SEM and X-ray micro-analysis calculations and enhancements to the text chapters are available on an accompanying CD.