Sputtering by Particle Bombardment
| Autor: | Rainer Behrisch, Wolfgang Eckstein |
|---|---|
| EAN: | 9783540445029 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 26.07.2007 |
| Untertitel: | Experiments and Computer Calculations from Threshold to MeV Energies |
| Kategorie: | |
| Schlagworte: | Energie Helium-Atom-Streuung distribution dynamics ion sputtering particle bombardment plasma physics sputtering |
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This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
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