Measurement Technology for Micro-Nanometer Devices
Autor: | Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao L |
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EAN: | 9781118717981 |
eBook Format: | |
Sprache: | Englisch |
Produktart: | eBook |
Veröffentlichungsdatum: | 18.10.2016 |
Kategorie: | |
Schlagworte: | micro-nano device measuring technology; micro-nano devices online testing; dynamic testing; typical devices testing; Lab View soft; micro-vision system test software; automatic extraction of infrared light interference fringes; micro-nano structure t |
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• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Wendong Zhang, President & Professor, North University of China, Shanxi Province, China. Dr Zhang has over 30 years experience working in the areas of dynamic testing techniques and Micro-nano-electromechanical systems (MEMS and NEMS). He is Deputy Director of the Ordnance Institute of China, Executive Member of Mirco-Nanometer Technology Institute of China and the Chairman of the Youth Science and Technology Association of Shanxi Province. He is the leading author of three books including an English book. He is also the winner of a couple of national and provincial level prizes.
Xiujian Chou, Associate Professor in North University of China. Engaged in research electronics, information functional materials and micro devices.
Tielin Shi, Huazhong?University?of?Science?and?Technology, China.
Zongmin Ma, North University of China, China.
Haifei Bao, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sceinces, China.
Jing Chen, Peking?University, China.
Liguo Chen, Soochow University, China.
Dachao Li, Associate Professor, Tianjin University, China; is engaged in MEMS devices and micro-instruments, micro-nanometer detection technology.
Chenyang Xue, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China.