Measurement Technology for Micro-Nanometer Devices
| Autor: | Bao, Haifei Chen, Jingdong Chen, Liguo Chou, Xiujian Li, Dachao Ma, Zongmin Shi, Tielin Xue, Chenyang Zhang, Wendong |
|---|---|
| EAN: | 9781118717967 |
| Sachgruppe: | Technik |
| Sprache: | Englisch |
| Seitenzahl: | 352 |
| Produktart: | Gebunden |
| Veröffentlichungsdatum: | 18.03.2017 |
| Schlagworte: | Technology & Industrial Arts |
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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