Measurement Technology for Micro-Nanometer Devices
| Autor: | Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, C |
|---|---|
| EAN: | 9781118717998 |
| eBook Format: | ePUB |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 18.10.2016 |
| Kategorie: | |
| Schlagworte: | <p>micro-nano device measuring technology Lab View soft automatic extraction of infrared light interference fringes dynamic testing micro-nano devices online testing micro-nano st micro-vision system test software typical devices testing |
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience
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