Strain Effect in Semiconductors
Autor: | Yongke Sun, Scott E. Thompson, Toshikazu Nishida |
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EAN: | 9781441905529 |
eBook Format: | |
Sprache: | Englisch |
Produktart: | eBook |
Veröffentlichungsdatum: | 14.11.2009 |
Untertitel: | Theory and Device Applications |
Kategorie: | |
Schlagworte: | CMOS technology Semiconductor Sensor fundamental physics logic devices microelectromechanical system (MEMS) optoelectronic devices strain-based MEMS strain effect strain physics |
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Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. Discusses relevant applications of strain while also focusing on the fundamental physics pertaining to bulk, planar, and scaled nano-devices. Hence, this book is relevant for current strained Si logic technology as well as for understanding the physics and scaling for future strained nano-scale devices.