Temperature Measurement during Millisecond Annealing
| Autor: | Denise Reichel |
|---|---|
| EAN: | 9783658113889 |
| eBook Format: | |
| Sprache: | Englisch |
| Produktart: | eBook |
| Veröffentlichungsdatum: | 07.01.2016 |
| Untertitel: | Ripple Pyrometry for Flash Lamp Annealers |
| Kategorie: | |
| Schlagworte: | emissivity flash lamp annealing lamp-based annealing of semiconductors mechanical oscillator semiconductors voice coil |
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.
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